4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Pretreatment of substrate or post-treatment of coated substrate

Electron Vision Corporation

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Electron beam annealing of metals, alloys, nitrides and...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Electron beam modification of perhydrosilazane spin-on glass

Coating processes – Direct application of electrical – magnetic – wave – or... – Polymerization of coating utilizing direct application of...
Reexamination Certificate

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Electron beam process during dual damascene processing

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Electron beam treatment of fluorinated silicate glass

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Electrostatic chuck having replaceable dielectric cover

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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