4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Elad Irron

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Integrated capacitor for RF applications with Ta adhesion layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Method suitable for batch ion etching of copper

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3093091

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