4. Optics: measuring and testing
  5. By polarized light examination
  6. With light attenuation

Edward M. Shamble

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Contact monitor, method of forming same and method of analyzing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Contact monitor, method of forming same and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate

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Method for checking lithography critical dimensions

Optics: measuring and testing – By polarized light examination – With light attenuation
Patent

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