4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

E. Derryck Settles

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High magnesium content copper magnesium alloys as diffusion...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method and apparatus for heating substrates in supercritical...

Heating – Heating or heat retaining work chamber structure
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Method and apparatus for in-situ measurement of thickness of...

Optics: measuring and testing – Dimension – Thickness
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Method of cleansing vias in semiconductor wafer having metal...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Sputter apparatus for producing multi-component metal alloy...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2153819

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