4. Electricity: measuring and testing
  5. Fault detecting in electric circuits and of electric components
  6. Of individual circuit component or element

Douglas S. Olsen

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Apparatus and method for controlling temperature in a device...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Apparatus and method for controlling temperature in a wafer...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Temperature-controlled chuck with recovery of circulating...

Heat exchange – With timer – programmer – time delay – or condition responsive... – Vent of system
Reexamination Certificate

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Wafer chuck having thermal plate with interleaved heating...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Wafer chuck having thermal plate with interleaved heating...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2606513

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