4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Douglas S. Armbrust

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In-situ monitoring of chemical vapor deposition process by...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Method to define and tailor process limited lithographic...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Self-aligned copper silicide formation for improved...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Self-aligned copper silicide formation for improved...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Semiconductor chip structures with embedded thermal...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Thermally responsive
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2025549

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