4. Electrolysis: processes, compositions used therein, and methods
  5. Electrolytic coating
  6. Coating selected area

Douglas E. Benoit

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Pattern density tailoring for etching of advanced...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Pattern density tailoring for etching of advanced...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Plating cell apparatus for x-ray mask fabrication

Chemistry: electrical and wave energy – Apparatus – Electrolytic
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Plating process for x-ray mask fabrication

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
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