4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Dongsoo Choi

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Sensor having tin oxide thin film for detecting methane gas and

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Tinoxide thin film, preparation thereof, and gas detecting senso

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-1206466

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