4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Dong-Soo Bang

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Device and method for fabricating diffractive gratings

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Device and method for fabricating diffractive gratings

Etching a substrate: processes – Nongaseous phase etching of substrate – Projecting etchant against a moving substrate or controlling...
Reexamination Certificate

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Distributed feedback semiconductor laser

Coherent light generators – Particular active media – Semiconductor
Reexamination Certificate

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Method for fabricating avalanche photodiode

Semiconductor device manufacturing: process – Avalanche diode manufacture
Reexamination Certificate

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Open tube-type impurity-diffusion apparatus for simultaneously d

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Profile ID: LFUS-PAI-P-1026119

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