4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Dong Hyung Lee

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Lift pin assembly for substrate processing

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Plasma immersed ion implantation process

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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