Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Fabrication of structures of metal/semiconductor compound by...
Fabrication of sub-micron etch-resistant metal/semiconductor...
Fabrication of sub-micron silicide structures on silicon using r
Method of producing an etch-resistant polymer structure...
Method using sub-micron silicide structures formed by...
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