4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Dietmar Ottenwälder

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Method for improving a doping profile for gas phase doping

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
Reexamination Certificate

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Method for manufacturing a trench capacitor

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Method for monitoring nitrogen processes

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2570406

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