4. Machine element or mechanism
  5. Gearing
  6. Toothed gear and recirculated unconnected elements

Dieter Bollmann

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Ball bearig gears

Machine element or mechanism – Gearing – Toothed gear and recirculated unconnected elements
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Bipolar carrier wafer and mobile bipolar electrostatic wafer...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method of producing a micro-electromechanical element

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method of producing a micromechanical structure for a...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method of producing calibration structures in semiconductor...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
Reexamination Certificate

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Profile ID: LFUS-PAI-P-410796

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