4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Diana X. Ma

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Plasma reactor with multi-section RF coil and isolated conductin

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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RF plasma reactor with hybrid conductor and multi-radius dome ce

Coating apparatus – Gas or vapor deposition – With treating means
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