4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Metal coating

Dennis Sauvage

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Low resistivity W using B.sub.2 H.sub.6 nucleation step

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent

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Low resistivity W using B2H6 nucleation step

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1270474

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