4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Apparatus
  6. With means for measuring, testing, or sensing

DCA Instruments Oy

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Phosphorus effusion cell arrangement and method for...

Chemistry of inorganic compounds – Phosphorus or compound thereof – Elemental phosphorus
Reexamination Certificate

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Sample treatment apparatus for use in molecular beam epitaxy

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Patent

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