4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

David V. Tsu

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Method and apparatus for the improved microwave deposition of th

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for the improved microwave deposition of thin films

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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Semiconductor with coordinatively irregular structures

Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Composite having voids in a component
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1972040

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