4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

David K Carlson

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Method and a system for sealing an epitaxial silicon layer...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Method of sealing an epitaxial silicon layer on a substrate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2502678

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