4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Danny Chien Lu

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Method and apparatus for cleaning by-products from plasma chambe

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method of cleaning a semiconductor device processing chamber...

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1767201

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