4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Daniel Joseph Vitkavage

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Damascene capacitors for integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Grooved capacitor structure for integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for removing etching residues and contaminants

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removing etching residues and contaminants

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Methods for fabricating a multilevel interconnection for an...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-583966

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