4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Dale R. DuBois

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Backside heating chamber for emissivity independent thermal...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Chemical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Chemical vapor deposition wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Chemical vapor deposition wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Chemical vapor deposition wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Profile ID: LFUS-PAI-P-602284

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