4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

CuTek Research Inc.

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Compliant wafer chuck

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Method for depositing and/or removing material on a substrate

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating
Reexamination Certificate

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Two-piece chuck

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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