4. Metal working
  5. Barrier layer or semiconductor device making

Curtis Vass

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Wafer out-of-pocket detection method

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Wafer out-of-pocket detection tool

Metal working – Barrier layer or semiconductor device making
Patent

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Wafer out-of-pocket detector and susceptor leveling tool

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1269083

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