4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Curt D. Bergeron

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Gas flow restricting cathode system for ion implanter and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Indirectly heated cathode ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2935388

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