4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Convac GmbH

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Apparatus for in-line lacquering of compact disks

Coating apparatus – With means to centrifuge work
Patent

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Apparatus for treating wafers in the manufacture of semiconducto

Coating apparatus – Gas or vapor deposition – Multizone chamber
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System for manufacturing semiconductor substrates

Metal working – Plural diverse manufacturing apparatus including means for... – Separate tool stations for selective or successive operation...
Patent

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