4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Colin F. Smith

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Deposition sub-chamber with variable flow

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Dual seal deposition process chamber and process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Mixing of materials in an integrated circuit manufacturing...

Agitating – By injecting gas into mixing chamber
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Profile ID: LFUS-PAI-P-2311234

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