4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Chuong Van Tran

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Optical element for multiple beam separation control

Optical: systems and elements – Single channel simultaneously to or from plural channels – By refraction at beam splitting or combining surface
Reexamination Certificate

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Thin film deposition chamber

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-1489409

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