4. Semiconductor device manufacturing: process
  5. Making device array and selectively interconnecting
  6. Using structure alterable to nonconductive state

Chung Lin Huang

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Method for making gate electrodes of low sheet resistance...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Method for manufacturing DRAM having a redundancy circuit region

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to nonconductive state
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