4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Chul Ju Hwang

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Apparatus for fabricating a semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Apparatus for fabricating semiconductor device and method...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Cluster tool for fabricating semiconductor device

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Gas injector adapted for ALD process

Fluid sprinkling – spraying – and diffusing – Slinger or splasher; or deflector rotated relative to effluent – Disc impeller type or bowl-like slinger or deflector
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High-permittivity dielectric capacitor for a semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-1844475

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