Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Borderless contact with buffer layer
High selectivity Si-rich SiON etch-stop layer
High selectivity Si-rich SiON etch-stop layer
Method of making borderless contact having a sion buffer layer
No associations
LandOfFree
Chu Yun Fu does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Chu Yun Fu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Chu Yun Fu will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2093005