4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Christopher L. Pike

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Hardmask trim process

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Hotplate offset ring

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
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Integrated edge exposure and hot/cool plate for a wafer...

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Reexamination Certificate

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Liquid chemical container with integrated fluid reservoir

Dispensing – Automatic control
Reexamination Certificate

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Method for coating ultra-thin resist films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1273433

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