4. Semiconductor device manufacturing: process
  5. Chemical etching

Christine Janowiak

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Convertible hot edge ring to improve low-K dielectric etch

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Convertible hot edge ring to improve low-K dielectric etch

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2486987

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