4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Chou-Shin Jou

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Method for controlling dopant diffusion in a plug-shaped...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for evenly immersing a wafer in a solution

Etching a substrate: processes – Nongaseous phase etching of substrate – Relative movement between the substrate and a confined pool...
Reexamination Certificate

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Method for preventing corrosion of a metallic layer of a semicon

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method of making IC capacitor

Semiconductor device manufacturing: process – Making passive device
Reexamination Certificate

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Monitor method for quality of metal ARC (antireflection...

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Profile ID: LFUS-PAI-P-697073

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