4. Etching a substrate: processes
  5. Gas phase etching of substrate

Chiukin (Steven) Lai

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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Methods for removing silicon nitride and other materials...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2353271

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