4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Ching-Hsu Chang

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Dual damascene process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of forming dual damascene structure

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Photolithography process with multiple exposures

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Profile ID: LFUS-PAI-P-2476613

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