4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Ching-Chang Alex Hung

Inventor

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Method and apparatus for spin coating

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Method of wet processing

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Wet processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Profile ID: LFUS-PAI-P-747376

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