4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Chih-Chen Lee

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Landform monitoring system having pressure sensing devices

Measuring and testing – Fluid pressure gauge – With protective separator
Reexamination Certificate

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Method for making a thin film bulk acoustic-wave resonator

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2879061

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