4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Methods

Chien-Hsun Lin

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CD SEM automatic focus methodology and apparatus for...

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate

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Method and system for improving critical dimension uniformity

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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System and method for improving immersion scanner overlay...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2888091

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