4. Optical: systems and elements
  5. Optical modulator
  6. Light wave directional modulation

Charles F. McConaghy

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Micro benchtop optics by bulk silicon micromachining

Etching a substrate: processes – Forming or treating optical article
Patent

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Micromachined electrostatic vertical actuator

Optical: systems and elements – Optical modulator – Light wave directional modulation
Patent

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Micromachined low frequency rocking accelerometer with...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1824360

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