4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Chan Lon Yang

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In situ hard mask approach for self-aligned contact etch

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Methods of forming semiconductor structures having reduced...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Oxide etch process with high selectivity to nitride suitable...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2130954

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