4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Cédric Monget

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Process for depositing a plasma polymerized organosilicon...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Process for depositing and developing a plasma polymerized...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Process for etching a polycrystalline Si(1-x)Ge(x) layer or...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2009026

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