4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Catherine M. Peyne

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Post etch cleaning composition and process for dual...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Post etch cleaning composition for dual damascene system

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2452161

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