4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Carolyn M. Matzke

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Formation of interconnections to microfluidic devices

Etching a substrate: processes – Forming or treating optical article
Reexamination Certificate

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Formation of microchannels from low-temperature plasma-deposited

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Microfabricated packed gas chromatographic column

Gas separation: apparatus – Chromatography type apparatus
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Silica substrate or portion formed from oxidation of...

Chemistry of inorganic compounds – Silicon or compound thereof – Oxygen containing
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Profile ID: LFUS-PAI-P-884844

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