4. Optical: systems and elements
  5. Lens
  6. With support

Carl Zeiss Semiconductor Manufacturing Technologies AG

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Adjusting apparatus for an optical element in a lens system

Optical: systems and elements – Lens – With support
Reexamination Certificate

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Catadioptric reduction lens

Optical: systems and elements – Lens – With reflecting element
Reexamination Certificate

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Device and method for changing the stress-induced...

Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate

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Diffractive optical element and also optical arrangement...

Optical: systems and elements – Diffraction – From grating
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Geometric beamsplitter and method for its fabrication

Optical: systems and elements – Single channel simultaneously to or from plural channels – By partial reflection at beam splitting or combining surface
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