4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Caizhong Tian

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Microwave plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Plasma processing system for treating a substrate

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2286498

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