4. Heating
  5. Processes of heating or heater operation
  6. Including apparatus purging, cleaning or accretion preventing

Bruce Han

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Method for avoiding polysilicon film over etch abnormal

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Method for avoiding polysilicon film over etch abnormal

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Method for purging furnace to decrease particle pollution in...

Heating – Processes of heating or heater operation – Including apparatus purging – cleaning or accretion preventing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2058522

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