4. Material or article handling
  5. Associated with semiconductor wafer handling
  6. Including wafer charging or discharging means for vacuum...

Bruce Gordon Ramsay

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Methods for angle limiting deposition mask

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Vacuum chamber load lock structure and article transport...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Vacuum chamber load lock structure and article transport...

Material or article handling – Associated with semiconductor wafer handling – Including wafer charging or discharging means for vacuum...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2629144

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