Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Inventor
active
Anti-stiction technique for electromechanical systems and...
Anti-stiction technique for electromechanical systems and...
Energy harvesting device manufactured by print forming...
Microelectromechanical systems encapsulation process
Passive self-tuning resonator system
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