4. Fluid handling
  5. Processes
  6. Involving pressure control

Brian K. McMillin

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Gas distribution apparatus for semiconductor processing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With etchant gas supply or exhaust structure located outside...
Reexamination Certificate

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Gas distribution apparatus for semiconductor processing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Inductively coupled plasma downstream strip module

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Inductively coupled plasma downstream strip module

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method and apparatus for detecting endpoint during plasma...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-1582721

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