4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Brian J. Grenon

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Inspecting optical masks with electron beam microscopy

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Method for repair of photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Methods for repair of photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Methods for repair of photomasks

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Methods for repair of photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Profile ID: LFUS-PAI-P-161226

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